Handbook of silicon based MEMS materials and technologies
Finna-recension
Handbook of silicon based MEMS materials and technologies
Sparad:
| Andra titlar |
Handbook of silicon based MEMS Handbook of Silicon Based MEMS Materials and Technologies |
|---|---|
| Språk |
engelska |
| Förlag |
William Andrew Publishing,
2015
|
| ISBN |
0-323-29965-2 0-323-31223-3 |
| Hämta fulltext | |