Handbook of silicon based MEMS materials and technologies
Finna-arvio
Handbook of silicon based MEMS materials and technologies
Tallennettuna:
| Muut nimekkeet |
Handbook of silicon based MEMS Handbook of Silicon Based MEMS Materials and Technologies |
|---|---|
| Kieli |
englanti |
| Julkaisija |
William Andrew Publishing,
2015
|
| ISBN |
0-323-29965-2 0-323-31223-3 |
| Hae kokoteksti | |