Resonant MEMS: Fundamentals, Implementation and Application
Finna-arvio
Resonant MEMS: Fundamentals, Implementation and Application
Tallennettuna:
| Muut nimekkeet |
Advanced Micro and Nanosystems Advanced Micro and Nanosystems Ser Resonant MEMS |
|---|---|
| Kieli |
englanti |
| Julkaisija |
Wiley-VCH,
2015
|
| ISBN |
3-527-33545-5 3-527-67636-8 3-527-67635-X 3-527-67633-3 |
| Hae kokoteksti | |