Enabling technologies for MEMS and nanodevices : Advanced micro and nanosystems
Finna-arvio
Enabling technologies for MEMS and nanodevices : Advanced micro and nanosystems
Tallennettuna:
| Muut nimekkeet |
Advanced Micro and Nanosystems Ser Advanced Micro and Nanosystems, Volume 3 Enabling Technologies for MEMS and Nanodevices - Advanced Micro and Nanosystems Enabling Technology for MEMS and Nanodevices Micro Process Engineering |
|---|---|
| Kieli |
englanti |
| Julkaisija |
Wiley-VCH,
2004
|
| ISBN |
3-527-30746-X 3-527-61670-5 9786611842970 1-281-84297-4 3-527-61692-6 |
| Hae kokoteksti | |