Atomic layer epitaxy growth of titanium, zirconium and hafnium dioxide thin films
Atomic layer epitaxy growth of titanium, zirconium and hafnium dioxide thin films
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| Genre | |
|---|---|
| Physical Description |
48, [62] sivua : kuvitettu ; 25 cm |
| Language |
English |
| Published |
Helsinki :
Suomalainen tiedeakatemia,
1994.
|
| Dissertation Note | Väitöskirja : Helsingin yliopisto |
| Series | Annales Academiae scientiarum Fennicae, Series A 2, Chemica, ISSN 0066-1961; 257. |
| Classification | |
| Additional Information | Mikko Ritala |
| ISBN |
951-41-0755-1 nidottu |
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