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Record Citations

APA Citation

Lindroos, V. M., Lindroos, V., Airaksinen, V., Franssila, S., Motooka, T., Paulasto-Krockel, M., & Tilli, M. (2015). Handbook of silicon based MEMS materials and technologies. William Andrew Publishing.

Chicago Style Citation

Lindroos, Veikko; Motooka, Veikko Lindroos, Veli-Matti Airaksinen, Sami Franssila, Teruaki Motooka, Mervi Paulasto-Krockel, and Markku Tilli. Handbook of Silicon Based MEMS Materials and Technologies. William Andrew Publishing, 2015.

MLA Citation

Lindroos, Veikko; Motooka, et al. Handbook of Silicon Based MEMS Materials and Technologies. William Andrew Publishing, 2015.

Harvard Style Citation

Lindroos, V. M., Lindroos, V., Airaksinen, V., Franssila, S., Motooka, T., Paulasto-Krockel, M. & Tilli, M. 2015. Handbook of silicon based MEMS materials and technologies. William Andrew Publishing.

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