Characterization, surface treatment and nanofabrication by charged particle beams
Characterization, surface treatment and nanofabrication by charged particle beams
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Genre | |
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Physical Description |
1 verkkoaineisto (xi, 60 sivua) : kuvitettu |
Language |
English |
Language of Abstract |
eng fin |
Item Description |
Artikkeliväitöskirjan yhteenveto-osa. |
Published |
Helsinki :
Aalto University,
2021.
|
Dissertation Note | Väitöskirja : Aalto-yliopisto, mikro- ja nanotekniikan laitos, 2021 |
Series | Aalto University publication series, Doctoral dissertations, ISSN 1799-4942; 2021, 125. |
Classification | |
Subjects | |
Additional Information | Antti Peltonen |
Painettu |
978-952-64-0510-0 |
ISBN |
978-952-64-0511-7 PDF |
Access | Aineisto on vapaasti saatavissa |
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