TY  - GEN
TY  - GEN
T1  - High purity silicon VI : proceedings of the Sixth International Symposium on High Purity Silicon, held in Phoenix, Arizona at the 198th Meeting of the Electrochemical Society, October 22-27, 2000
T2  - Proceedings / Electrochemical Society
A2  - Claeys, C. L.
LA  - eng
PP  - Pennington (NJ)
PB  - Electrochemical Society
YR  - 2000
UL  - https://kansalliskirjasto.finna.fi/Record/vaari.1710847
SN  - 1-56677-284-2
ER  -