TY - GEN TY - GEN T1 - Molecular beam epitaxy growth and characterization of GaN, AlN and AlGaN/GaN heterostructures T2 - Technical report MC2 T2 - Doktorsavhandlingar vid Chalmers tekniska högskola A1 - Davidsson, Stefan LA - eng PP - Göteborg PB - Chalmers University of Technology. Dept. of Microtechnology and Nanoscience. Microwave Electronics Laboratory YR - 2005 UL - https://kansalliskirjasto.finna.fi/Record/vaari.1631669 SN - 91-7291-661-3 KW - III-nitride KW - molecular beam epitaxy ER -