TY  - GEN
TY  - GEN
T1  - Handbook of silicon based MEMS materials and technologies
A1  - Lindroos, Veikko; Motooka, Teruaki; Franssila, Sami; Paulasto-Krockel, Mervi; Tilli, Markku; Airaksinen, Veli-Matti
A2  - Lindroos, Veikko
A2  - Airaksinen, Veli-Matti
A2  - Franssila, Sami
A2  - Motooka, Teruaki
A2  - Paulasto-Krockel, Mervi
A2  - Tilli, Markku
LA  - eng
PB  - William Andrew Publishing
YR  - 2015
UL  - https://kansalliskirjasto.finna.fi/Record/nelli06.4540000000000048
SN  - 0-323-29965-2
SN  - 0-323-31223-3
ER  -