TY  - GEN
TY  - GEN
T1  - Handbook of Cleaning for Semiconductor Manufacturing: Fundamentals and Applications
A1  - Karen A. Reinhardt
A2  - Reidy, Richard F.
A2  - Reinhardt, Karen A.
LA  - eng
PB  - John Wiley & Sons, Inc
YR  - 2010
UL  - https://kansalliskirjasto.finna.fi/Record/nelli06.3400000000000352
SN  - 0-470-62595-3
SN  - 1-118-09951-6
SN  - 1-118-07174-3
SN  - 1-61344-177-0
SN  - 9786613374592
SN  - 1-283-37459-5
SN  - 1-118-07173-5
KW  - Engineering : Electronics
ER  -