TY  - GEN
TY  - GEN
T1  - Handbook of Physical Vapor Deposition (PVD) Processing
A1  - Mattox, D. M.
LA  - eng
PB  - William Andrew Publishing
YR  - 2010
UL  - https://kansalliskirjasto.finna.fi/Record/nelli06.2550000000014100
SN  - 0-8155-2037-9
SN  - 9786612737695
SN  - 0-8155-2038-7
SN  - 0-08-094658-5
SN  - 1-282-73769-4
KW  - Engineering : Electronics
ER  -