TY - GEN TY - GEN T1 - Smart Mems And Sensor Systems A1 - Gaura, Elena A2 - Flewitt, Andrew A2 - Kraft, Michael A2 - Lima Monteiro, Davies William de A2 - Newman, Robert M. A2 - Newman Robert A2 - Robert Newman A2 - Lima Monteiro, Davies LA - eng PB - World Scientific Publishing Company YR - 2006 UL - https://kansalliskirjasto.finna.fi/Record/nelli06.1000000000398169 SN - 1-86094-493-0 SN - 9786611867393 SN - 1-60119-887-6 SN - 1-281-86739-X SN - 1-86094-920-7 KW - Engineering : Electronics ER -