TY - GEN TY - GEN T1 - Integrated circuit fabrication : science and technology A1 - Plummer, James D., kirjoittaja A1 - Griffin, Peter B., kirjoittaja LA - eng PP - Cambridge ; New York PB - Cambridge University Press YR - 2024 UL - https://kansalliskirjasto.finna.fi/Record/helka.9934584495706253 AB - "Master fundamental technologies for modern semiconductor integrated circuits with this definitive textbook, for students from a range of STEM backgrounds, with a focus on big-picture thinking and industry-grade simulation. Includes over 450 full-color figures and over 280 homework problems, with solutions and lecture slides for instructors"-- SN - 978-1-00-930358-3 kovakantinen KW - Integrated circuits : Design and construction. KW - Semiconductors : Design and construction. ER -